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dc.contributor.author안광덕-
dc.contributor.author구덕일-
dc.date.accessioned2015-12-02T02:59:35Z-
dc.date.available2015-12-02T02:59:35Z-
dc.date.issued199401-
dc.identifier.citationv. 537, 124-141-
dc.identifier.other4002-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/8075-
dc.publisherPolymers for microelectronics : ACS symposium series-
dc.subjectN-(t-butoxy)maleimide-
dc.subjectprotected polymers-
dc.subjectthermal deprotection-
dc.subjectacidolytic deprotection deep UV photoresists-
dc.subjectthermally stable resists-
dc.subjectchemical amplification resists-
dc.titleSynthesis and polymerizations of N-(tert-butoxy)maleimide and application of its polymers as a chemical amplification resist.-
dc.typeArticle-
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