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Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.

Title: Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.

Authors: 안광덕; 구덕일; 정찬문

Keywords: functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists

Issue Date: 1994-01

Publisher: Journal of photopolymer science and technology

Citation: v. 7, no. 3, 473-482

URI: https://pubs.kist.re.kr/handle/201004/8079

Appears in Collections:: KIST Publication > Article

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