Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.
- Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.
- 안광덕; 구덕일; 정찬문
- functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists
- Issue Date
- Journal of photopolymer science and technology
- v. 7, no. 3, 473-482
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- KIST Publication > Article
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