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The effect of buffer layer on the electrical properties of (BaSr)TiO//3 thin films deposited on indium tin oxide-coated glass substrate by using rf magnetron sputtering method.

Title: The effect of buffer layer on the electrical properties of (BaSr)TiO//3 thin films deposited on indium tin oxide-coated glass substrate by using rf magnetron sputtering method.

Authors: 김태송; 김종희; 오명환

Keywords: BST thin film; sputtering process; ITO substrate; buffer layer

Issue Date: 1994-01

Publisher: Journal of applied physics

Citation: v. 76, no. 7, 4316-4322

URI: https://pubs.kist.re.kr/handle/201004/8080

Appears in Collections:: KIST Publication > Article

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