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Novel functional polymers from N-(tosyloxy)maleimide. Photochemical acid generation in solid-state and application as resist materials.

Title: Novel functional polymers from N-(tosyloxy)maleimide. Photochemical acid generation in solid-state and application as resist materials.

Authors: 안광덕; 구덕일; 정찬문

Keywords: functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists

Issue Date: 1994-01

Publisher: Chem. mater.

Citation: v. 6, 1452-1456

URI: https://pubs.kist.re.kr/handle/201004/8095

Appears in Collections:: KIST Publication > Article

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