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Fabrication of silicon membrane using fusion bonding and two-step electrochemcial etch-stopping

Title
Fabrication of silicon membrane using fusion bonding and two-step electrochemcial etch-stopping
Authors
주병권; 오명환; K. H. Tchah
Keywords
micromachining; direct bonding; micromechanical structure
Issue Date
1994-01
Publisher
Journal of materials science
Citation
VOL 29, NO 3, 664-668
URI
https://pubs.kist.re.kr/handle/201004/8112
ISSN
0022-2461
Appears in Collections:
KIST Publication > Article
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