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dc.contributor.authorCHO, IL JOO-
dc.date.accessioned2024-01-12T07:52:07Z-
dc.date.available2024-01-12T07:52:07Z-
dc.date.created2022-01-14-
dc.date.issued2007-11-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81397-
dc.publisherASME-
dc.titleFabrication and Simulation of Nitride Cantilever for Low Power Nano-Data-Storage-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation2007 ASME Interational Mechanical Engineering Congress and Exposition, pp.11 - 15-
dc.citation.title2007 ASME Interational Mechanical Engineering Congress and Exposition-
dc.citation.startPage11-
dc.citation.endPage15-
dc.citation.conferencePlaceUS-
dc.relation.isPartOfMechanical Engineering Congress and Exposition-
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KIST Conference Paper > 2007
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