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Thermally sprayed Al2O3 and Y2O3 coatings for corrosion protection in reactive ion etching

Authors

K.H.Baik; Y.R.Lee; Seok, Hyun Kwang

Issue Date

2006-10

Citation

Asian Thermal Spray Conference 2006, pp.78 - 79

Keywords

thermal spray; corrosion; reactive ion etching

URI

https://pubs.kist.re.kr/handle/201004/81554

Appears in Collections:

KIST Conference Paper > 2006

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