사파이어 기판의 전처리 방법 및 이를 이용한 산화아연 박막증착 방법

Author
최원국정연식노영수박종용
Assignee
한국과학기술연구원
Regitration Date
2006-03-27
Registration No.
566917
Application Date
2003-12-10
Application No.
2003-0089429
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81618
Appears in Collections:
KIST Patent > 2003
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