STI-CMP용 고성능 슬러리

Author
이해원임건자김태은김주선이종호
Assignee
한국과학기술연구원
Regitration Date
2006-06-27
Registration No.
0596688
Application Date
2003-05-16
Application No.
2003-0031269
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81631
Appears in Collections:
KIST Patent > 2003
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