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Thermophoretic effect on particle deposition toward a horizontal wafer.

Title
Thermophoretic effect on particle deposition toward a horizontal wafer.
Authors
배귀남; 이춘식; 안이기; 박승오
Keywords
particle deposition velocity; 입자침착속도; thermophoresis; 열영동; horizontal wafer; 수평 웨이터
Issue Date
1994-01
Publisher
대한기계학회논문집
Citation
VOL 제 18 권, 175-183
URI
https://pubs.kist.re.kr/handle/201004/8170
Appears in Collections:
KIST Publication > Article
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