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고감도 초소형 캔틸레버 센서 및 제조방법

Author

김태송; 김용범; 김형준

Assignee

한국과학기술연구원

Regitration Date

2004-09-28

Registration No.

6,797,631

Application Date

2002-08-02

Application No.

10/209,866

Country

US

URI

https://pubs.kist.re.kr/handle/201004/81722

Appears in Collections:

KIST Patent > 2002

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