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MBE 장치에 의한 에피성장 균일도 계산 .

Title
MBE 장치에 의한 에피성장 균일도 계산 .
Authors
김은규; 윤경식; 민석기
Keywords
MBE; GaAs epi-layer; computer simulation
Issue Date
1993-08
Publisher
대한전자공학회지
Citation
v. 30A, no. 8, 671-677
URI
https://pubs.kist.re.kr/handle/201004/8181
Appears in Collections:
KIST Publication > Article
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