실리콘 용융접합을 이용한 센서용 실리콘 구조 및 그 제조방법

Author
주병권오명환
Assignee
한국과학기술연구원
Regitration Date
1995-01-20
Registration No.
81645
Application Date
1991-11-21
Application No.
91-20835
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81852
Appears in Collections:
KIST Patent > Others
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