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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.date.accessioned2024-01-12T08:10:04Z-
dc.date.available2024-01-12T08:10:04Z-
dc.date.issued1995-01-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81852-
dc.title실리콘　용융접합을　이용한　센서용　실리콘　구조　및　그　제조방법-
dc.typePatent-
dc.date.registration1995-01-20-
dc.date.application1991-11-21-
dc.identifier.patentRegistrationNumber81645-
dc.identifier.patentApplicationNumber91-20835-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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