직류전원 플라즈마 화학중착법에 의한다이아몬드막의 합성방법

Author
백영준은광용이재갑
Assignee
한국과학기술연구원
Regitration Date
1996-10-10
Registration No.
105957
Application Date
1993-12-31
Application No.
93-32330
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81871
Appears in Collections:
KIST Patent > Others
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