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dc.contributor.author백영준-
dc.contributor.author은광용-
dc.contributor.author이재갑-
dc.date.accessioned2024-01-12T08:10:29Z-
dc.date.available2024-01-12T08:10:29Z-
dc.date.issued1996-10-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81871-
dc.title직류전원　플라즈마　화학중착법에　의한다이아몬드막의　합성방법-
dc.typePatent-
dc.date.registration1996-10-10-
dc.date.application1993-12-31-
dc.identifier.patentRegistrationNumber105957-
dc.identifier.patentApplicationNumber93-32330-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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