KIST Library Institutional Repository

고주파　플라즈마　화학증착법을　이용한원형　기판용　코팅층의　대량　합성장　치　및　합성방법

Author

은광용; 이광렬

Assignee

한국과학기술연구원

Regitration Date

1997-12-05

Registration No.

131987

Application Date

1994-08-17

Application No.

94-20259

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/81893

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML