DSpace at KISTKIST PatentOthers

Full metadata record

DC Field Value Language
dc.contributor.author고석근-
dc.contributor.author김기환-
dc.contributor.author정형진-
dc.date.accessioned2024-01-12T08:11:16Z-
dc.date.available2024-01-12T08:11:16Z-
dc.date.issued1998-09-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81908-
dc.title이온클러스터빔을　이용한　반도체소자용구리박막　제조방법-
dc.typePatent-
dc.date.registration1998-09-01-
dc.date.application1995-07-21-
dc.identifier.patentRegistrationNumber162867-
dc.identifier.patentApplicationNumber95-21554-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
Appears in Collections:
KIST Patent > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE