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Transfer of Si3N4 Cantilever Array on a CMOS Circuit Using New Wafer Level Bonding for Probe-Based Nano Data Storage Application

Authors

CHO, IL JOO

Issue Date

2006-04-15

Publisher

IUMRS

Citation

MRS 2006

URI

https://pubs.kist.re.kr/handle/201004/81933

Appears in Collections:

KIST Conference Paper > 2006

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