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Atomic transport in thermal spike induced ion mixing

Title
Atomic transport in thermal spike induced ion mixing
Authors
채근화; 송종한; 정순명; 장호재; 우정주; 정기섭; 황정남; 오영제; 정형진
Keywords
atomic transport; ion mixing; thermal spike; activation energy; impurity diffusion; RBS
Issue Date
1993-05
Publisher
Journal of applied physics
Citation
VOL 73, NO 9, 4292-4296
URI
https://pubs.kist.re.kr/handle/201004/8204
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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