DSpace at KIST: Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications

Browse

My Repository

DSpace at KISTKIST Conference Paper 2005

Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications

Authors: CHO, IL JOO

Issue Date: 2005-05-15

Publisher: ETH

Citation: 1st Korea-Switzerland Science & Technology

URI: https://pubs.kist.re.kr/handle/201004/82042

Appears in Collections:: KIST Conference Paper > 2005

Files in This Item:

Export: RIS (EndNote); XLS (Excel); XML

Show Full Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE