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Integrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application

Authors

CHO, IL JOO

Issue Date

2005-01-15

Publisher

IEEE

Citation

Proceedings of the 17th IEEE International Conference on MEMS, pp.247 - 250

URI

https://pubs.kist.re.kr/handle/201004/82072

Appears in Collections:

KIST Conference Paper > 2005

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