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일체화된 λ/4 적외선 흡수층 구조의 마이크로 볼로미터 응용

Authors

Moon, Sung Wook

Issue Date

2004-11-01

Citation

한국센서학회, pp.0

URI

https://pubs.kist.re.kr/handle/201004/82106

Appears in Collections:

KIST Conference Paper > 2004

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