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dc.contributor.authorKim, Joon Kon-
dc.date.accessioned2024-01-12T08:19:29Z-
dc.date.available2024-01-12T08:19:29Z-
dc.date.created2022-01-14-
dc.date.issued2004-10-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82142-
dc.titleA new device for indirect beam monitoring for large area ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationU. of North Texas, pp.0-
dc.citation.titleU. of North Texas-
dc.citation.startPage0-
dc.citation.endPage0-
dc.relation.isPartOfConference of Application of Accelerator in Research and Industry - 직접입력-
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KIST Conference Paper > 2004
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