KIST Library Institutional Repository

박막　증착　장치

Author

장홍규; 최원국; 정형진; 고석근

Assignee

한국과학기술연구원

Regitration Date

1998-12-11

Registration No.

182373

Application Date

1996-07-18

Application No.

96-28938

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/82212

Appears in Collections:

KIST Patent > Others

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