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Interfacial oxide growing and filling-up behavior of the micro-gap in silicon fusion bonding processes

Title: Interfacial oxide growing and filling-up behavior of the micro-gap in silicon fusion bonding processes

Authors: 주병권; 오명환; K. H. Tchah

Keywords: micromachining; direct bonding; interfacial oxide

Issue Date: 1993-02

Publisher: Journal of materials science

Citation: VOL 28, NO 5, 1168-1174

URI: https://pubs.kist.re.kr/handle/201004/8227

ISSN: 0022-2461

Appears in Collections:: KIST Publication > Article

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