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Fabrication of high TCR bolometric thin films based on low temperature annealing and its application to the surface micromachined uncooled microbolome

Authors

Moon, Sung Wook; Shin, Hyun Joon

Issue Date

2003-11-01

Citation

MRS, pp.242

URI

https://pubs.kist.re.kr/handle/201004/82607

Appears in Collections:

KIST Conference Paper > 2003

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