A study on the structural properties of Rf magnetron sputtered Ba1-xSrxTiO3 thin film

Title
A study on the structural properties of Rf magnetron sputtered Ba1-xSrxTiO3 thin film
Authors
김태송오명환김종희
Keywords
BST thin film; sputtering process; ITO substrate
Issue Date
1993-01
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 30, NO 6, 441-448
URI
https://pubs.kist.re.kr/handle/201004/8266
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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