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SOI 제작을 위한 수소 이온주입 특성

Authors

Kim, Sun Ho; Byun, Young Tae

Issue Date

2003-07-01

Citation

한국광학회, pp.230 - 231

URI

https://pubs.kist.re.kr/handle/201004/82708

Appears in Collections:

KIST Conference Paper > 2003

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