Influence of argon pressure on the composition of Co-early transition metal films fabricated by r.f. magnetron sputtering in the composite target mode

Title
Influence of argon pressure on the composition of Co-early transition metal films fabricated by r.f. magnetron sputtering in the composite target mode
Authors
한석희김희중강일구이정중
Keywords
Co alloy; amorphous; soft magnetic ribbon
Issue Date
1993-01
Publisher
Journal of Materials Science
Citation
VOL 28, 3267-3271
URI
https://pubs.kist.re.kr/handle/201004/8277
ISSN
0022-2461
Appears in Collections:
KIST Publication > Article
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