III-인화계 기판상에 III-비화계 에피층을 성장하는 방법

Author
송진동강준현양현덕한일기
Assignee
한국과학기술연구원
Regitration Date
2020-07-02
Registration No.
10-2131619
Application Date
2018-06-12
Application No.
10-2018-0067504
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/82849
Appears in Collections:
KIST Patent > 2018
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