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마이크로 볼로미터를 위한 바나듐 산화물 박막 제조 방법

Author

백승협; 길태현; 이기석; 최원준; 백정민; 김상현

Assignee

한국과학기술연구원

Regitration Date

2019-08-06

Registration No.

10371571

Application Date

2018-03-20

Application No.

15/926366

Country

US

URI

https://pubs.kist.re.kr/handle/201004/82930

Appears in Collections:

KIST Patent > 2018

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