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변형된 저마늄을 포함하는 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자

Author

김형준; 김상현; 임희정; 김연수; 심재필

Assignee

한국과학기술연구원

Regitration Date

2018-08-10

Registration No.

10-1889352

Application Date

2016-09-13

Application No.

2016-0118034

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/82969

Appears in Collections:

KIST Patent > 2016

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