SOI 제작을 위한 습식 열산화막 성장 및 특성

Authors
Kim, Sun HoByun, Young Tae
Issue Date
2003-02-01
Citation
한국광학회 제14회 정기총회 및 2003년도 동계학술발표회, pp.172 - 173
URI
https://pubs.kist.re.kr/handle/201004/83102
Appears in Collections:
KIST Conference Paper > 2003
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