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다중 가스셀 모듈을 이용한 극자외선 빔 생성장치

Author

전영민; 김용수; 안준모; 서민아; 우덕하; 박민철; 변영태; 김철기; 이석; 김재헌

Assignee

한국과학기술연구원

Regitration Date

2015-07-30

Registration No.

10-1542333

Application Date

2014-12-26

Application No.

10-2014-0191162

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/83390

Appears in Collections:

KIST Patent > 2014

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