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Synthesis and polymerization of N-(tert-butoxy)maleimide and characteristic properties of its polymers for application as chemical amplification resists.

Title: Synthesis and polymerization of N-(tert-butoxy)maleimide and characteristic properties of its polymers for application as chemical amplification resists.

Authors: 안광덕; 구덕일

Keywords: chemical amplification resists; thermally stable resist materials; high deprotection temperature; deprotection of polymers

Issue Date: 1992-04

Publisher: Proceedings of polymeric materials-science and engineering (PMSE)

Citation: v. 66, 249-250

URI: https://pubs.kist.re.kr/handle/201004/8341

Appears in Collections:: KIST Publication > Article

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