반사 방지막 증착 방법 및 그 장치

Author
한승희김경훈신상범이근혁김성민
Assignee
한국과학기술연구원
Regitration Date
2018-10-04
Registration No.
10-1907143
Application Date
2013-11-22
Application No.
2013-0143014
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/83448
Appears in Collections:
KIST Patent > 2013
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