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Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process

Title: Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process

Authors: 오태성; 이창봉; 이병찬; 오영제; 김윤호

Keywords: sol-gel; Ta2O5 thin film; crystalline phase; dielectric properties; leakage current

Issue Date: 1992-01

Publisher: Journal of the Korean ceramic society; 한국요업학회지

Citation: VOL 29, NO 1, 29-34

URI: https://pubs.kist.re.kr/handle/201004/8398

Appears in Collections:: KIST Publication > Article

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