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반도체생산 공정에서 배출되는 함불소가스를 효과적으로 분해하기 위한 흡착농축시스템과 결합된 열분해복합공정 기술

Author

이중기; 조병원; 이화영; 김형석; 우주만; 장원영; 유경선; 이상득

Assignee

한국과학기술연구원

Regitration Date

2011-07-20

Registration No.

10-1052064

Application Date

2009-05-29

Application No.

2009-0047382

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/84010

Appears in Collections:

KIST Patent > 2009

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