금속 스퍼터링을 이용한 전도성필름 제조방법 및 전도성필름

Author
이현정김준경오경아황선나
Assignee
한국과학기술연구원
Regitration Date
2010-12-30
Registration No.
1006456
Application Date
2009-04-15
Application No.
2009-0032914
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/84032
Appears in Collections:
KIST Patent > 2009
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