나노 결정질 다이아몬드 박막 중의 비정상 거대입자의 개재를 방지하는 방법

Author
이욱성박종극백영준Heqing Li
Assignee
한국과학기술연구원
Regitration Date
2009-10-13
Registration No.
10-0922543
Application Date
2007-09-14
Application No.
2007-0093541
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/84128
Appears in Collections:
KIST Patent > 2007
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