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Lithium phosphorous oxy nitride(Lipon) 고체전해질 박막의 이온전도도에 미치는 RF sputtering power의 효과 = Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries

Authors

Cho, Byung Won

Issue Date

2001-01-01

Citation

, pp.0

URI

https://pubs.kist.re.kr/handle/201004/84257

Appears in Collections:

KIST Conference Paper > 2001

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