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dc.contributor.authorLEE, YEON HEE-
dc.date.accessioned2024-01-12T10:12:18Z-
dc.date.available2024-01-12T10:12:18Z-
dc.date.created2022-01-14-
dc.date.issued2000-02-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84412-
dc.titlePlasma source ion implantation for shallow p+/n junction-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회, pp.0-
dc.citation.title한국진공학회-
dc.citation.startPage0-
dc.citation.endPage0-
dc.relation.isPartOf한국진공학회 학술발표회 - 직접입력-
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KIST Conference Paper > 2000
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