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An Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures

Authors

CHO, IL JOO

Issue Date

2000-01-15

Publisher

IEEE

Citation

Proceedings of IEEE the 13th International Conference on MEMS, pp.142 - 147

URI

https://pubs.kist.re.kr/handle/201004/84413

Appears in Collections:

KIST Conference Paper > 2000

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