Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHO, IL JOO | - |
dc.date.accessioned | 2024-01-12T10:12:19Z | - |
dc.date.available | 2024-01-12T10:12:19Z | - |
dc.date.created | 2022-01-14 | - |
dc.date.issued | 2000-01-15 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/84413 | - |
dc.publisher | IEEE | - |
dc.title | An Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | Proceedings of IEEE the 13th International Conference on MEMS, pp.142 - 147 | - |
dc.citation.title | Proceedings of IEEE the 13th International Conference on MEMS | - |
dc.citation.startPage | 142 | - |
dc.citation.endPage | 147 | - |
dc.citation.conferencePlace | JA | - |
dc.relation.isPartOf | Proceedings of IEEE the 13th International Conference on MEMS | - |
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