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dc.contributor.authorCHO, IL JOO-
dc.date.accessioned2024-01-12T10:12:19Z-
dc.date.available2024-01-12T10:12:19Z-
dc.date.created2022-01-14-
dc.date.issued2000-01-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84413-
dc.publisherIEEE-
dc.titleAn Audio Frequency Filter Application of Micromachined Thermally-Isolated Diaphragm Structures-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of IEEE the 13th International Conference on MEMS, pp.142 - 147-
dc.citation.titleProceedings of IEEE the 13th International Conference on MEMS-
dc.citation.startPage142-
dc.citation.endPage147-
dc.citation.conferencePlaceJA-
dc.relation.isPartOfProceedings of IEEE the 13th International Conference on MEMS-
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KIST Conference Paper > 2000
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