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CVD 다이아몬드 웨이퍼의 역학적 신뢰성에 미치는 잔류응력 평가연구

Authors

Jeong, Jeung hyun

Issue Date

2000-01-01

Citation

대한기계학회, pp.286 - 293

URI

https://pubs.kist.re.kr/handle/201004/84453

Appears in Collections:

KIST Conference Paper > 2000

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