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dc.contributor.authorJeong, Jeung hyun-
dc.date.accessioned2024-01-12T10:13:11Z-
dc.date.available2024-01-12T10:13:11Z-
dc.date.created2022-01-14-
dc.date.issued2000-01-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84453-
dc.titleCVD 다이아몬드 웨이퍼의 역학적 신뢰성에 미치는 잔류응력 평가연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한기계학회, pp.286 - 293-
dc.citation.title대한기계학회-
dc.citation.startPage286-
dc.citation.endPage293-
dc.relation.isPartOf재료 및 파괴부문 학술대회 논문집-
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KIST Conference Paper > 2000
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