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AlN 열방출층 및 TiN 전극이 적용된 상변화 메모리

Author

김성일; 김용태; 김인수; 김춘근; 염민수; 김영환

Assignee

한국과학기술연구원

Regitration Date

2007-12-11

Registration No.

7,307,269

Application Date

2005-11-08

Application No.

11/270711

Country

US

URI

https://pubs.kist.re.kr/handle/201004/84514

Appears in Collections:

KIST Patent > 2005

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