KIST Library Institutional Repository

산소 플라즈마 급속 열처리를 이용한 강유전체 게이트 제조 방법

Author

김용태; 김춘근; 김영환; 김성일

Assignee

한국과학기술연구원

Regitration Date

2005-10-19

Registration No.

0524115

Application Date

2003-05-13

Application No.

2003-0030267

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/84556

Appears in Collections:

KIST Patent > 2003

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML