캔틸레버 센서 및 그 제조 방법

Author
김태송이정훈김형준강지윤
Assignee
한국과학기술연구원
Regitration Date
2006-04-04
Registration No.
7,022,540
Application Date
2003-05-30
Application No.
10/448,188
Country
US
URI
https://pubs.kist.re.kr/handle/201004/84634
Appears in Collections:
KIST Patent > 2003
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